| Customization: | Available |
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| After-sales Service: | Online Instruction |
| Warranty: | 1year |
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Mass Flow Controller (MFC) is used for precise measurement and control of gas mass flow. They play an important role in scientific research and production in various fields such as semiconductor and integrated circuit industry, special materials discipline, chemical industry, petroleum industry, medicine, environmental protection, and vacuum. Its typical application scenarios include electronic process equipment such as diffusion, epitaxy CVD, Oxidation, plasma etching, sputtering, ion implantation; And coating equipment, fiber optic melting, microreactor device, mixed gas distribution system, capillary measurement, gas chromatograph and other analytical instruments.
Parameter
| The parameters of Hydrogen Cixi Medical Oxygen Mass Flow Meter Controller | |
| Medium | Gas |
| Flow Range | 0~5sccm;0~500sccm;0~100slm;100~200L/min |
| Power supply | 12-24V |
| Output | 0~5V;4~20mA |
| Display | Local LCD Display or none |
| Communication | RS485/232 |
| Accuracy | 1.0% |
| Difference pressure | less than 0.3Mpa |
| Max pressure | 3.0Mpa |
| Temperature | 5~65c |
| Connection | 6mm ferrule connector |
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